Instrumental aspects of secondary ion mass spectrometry and secondary ion imaging mass spectrometry

A short survey of the varieties of the Secondary Ion Mass Spectrometry (SIMS) known at present is given. The principle of quantitative analysis with respect to thin film analysis is discussed. The properties of SIMS and SIIMS (Secondary Ion Imaging Mass Spectrometry) are compared with those of Electron Microprobe Analysis. Results of an analysis of a thin film of titanium oxide and of an FeMn ferrite by means of SIMS and SIIMS are given.