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蓝宝石衬底AlGaN/GaN共栅共源微波HEMTs器件
引用本文:邵刚,刘新宇,和致经,刘健,吴德馨. 蓝宝石衬底AlGaN/GaN共栅共源微波HEMTs器件[J]. 半导体学报, 2004, 25(12)
作者姓名:邵刚  刘新宇  和致经  刘健  吴德馨
作者单位:中国科学院微电子研究所,北京,100029
基金项目:国家重点基础研究发展计划(973计划),中国科学院知识创新工程项目
摘    要:报道了蓝宝石衬底AlGaN/GaN共栅共源器件的制备与特性.该器件包括栅长为0.8μm共源器件与栅长为1μm的共栅器件.实验表明,共栅器件的第二栅压会显著影响器件饱和电流与跨导特性,从而控制功率增益.与共源器件相比,共栅共源器件表现出稍低的 f T、较低的反馈、显著增加的功率资用增益及较高的端口阻抗.

关 键 词:共栅共源  宽带  AlGaN/GaN  HEMTs  蓝宝石

Cascode Connected AlGaN/GaN Microwave HEMTs on Sapphire Substrates
SHAO Gang,Liu Xinyu,He Zhijing,Liu Jian,Wu Dexin. Cascode Connected AlGaN/GaN Microwave HEMTs on Sapphire Substrates[J]. Chinese Journal of Semiconductors, 2004, 25(12)
Authors:SHAO Gang  Liu Xinyu  He Zhijing  Liu Jian  Wu Dexin
Abstract:Fabrication and characteristics of cascade connected AlGaN/GaN HEMTs grown on sapphire substrates are reported.The circuit employs a common source device,which has a gate length of 0.8μm cascode connected to a 1μm common gate device.The second gate bias will not only remarkably affect saturated current and transconductance,but also realize power gain control.Cascode device exhibits a slight lower of f T,a less feedback,a largely greater of maximum available gain and a higher impedance compare to that of common source device.
Keywords:cascade  broadband  AlGaN/GaN  HEMTs  sapphire
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