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飞秒激光烧蚀玻璃基质金属薄膜直写衍射光栅
引用本文:胡晓,赵全忠,姜雄伟,邱建荣,朱从善.飞秒激光烧蚀玻璃基质金属薄膜直写衍射光栅[J].中国激光,2006,33(1):7-20.
作者姓名:胡晓  赵全忠  姜雄伟  邱建荣  朱从善
作者单位:中国科学院上海光学精密机械研究所,上海,201800
基金项目:中国科学院资助项目;中国博士后科学基金;王宽诚教育基金
摘    要:提出了一种新的制备光栅的方法,利用800 nm的飞秒激光扫描蒸镀在石英玻璃衬底表面的金薄膜,通过烧蚀金薄膜在衬底表面形成衍射光栅。用波长为532 nm的激光照射光栅,测量其一级衍射效率,测得的衍射效率最高为6.98%。通过改变激光扫描速度、激光功率、光栅周期等实验参数研究其对制备的光栅的一级衍射效率的影响,结果表明,降低激光扫描速度,减小光栅周期,或增加激光功率都能提高制备光栅的一级衍射效率。

关 键 词:激光技术  飞秒激光  光栅  衍射效率  烧蚀
文章编号:0258-7025(2006)01-0007-04
收稿时间:2005-05-26
修稿时间:2005-08-25

Inscribing Diffraction Grating by Femtosecond Laser Ablation of Metal Film on Glass Substrate
HU Xiao,ZHAO Quan-zhong,JIANG Xiong-wei,QIU Jian-rong,ZHU Cong-shan.Inscribing Diffraction Grating by Femtosecond Laser Ablation of Metal Film on Glass Substrate[J].Chinese Journal of Lasers,2006,33(1):7-20.
Authors:HU Xiao  ZHAO Quan-zhong  JIANG Xiong-wei  QIU Jian-rong  ZHU Cong-shan
Affiliation:Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China
Abstract:A new method of inscribing diffraction gratings by using a focused near-IR 800 nm femtosecond laser ablating gold film on glass substrate was reported.The first-order diffraction efficiency of the grating was measured using a 532 nm laser,the highest of which was 6.98%.Through changing the experimental parameters such as the laser scanning speed,the laser power and the grating period,the effects of these parameters on the diffraction efficiency of the gratings were studied.The experimental results showed that decreasing the laser scanning speed and the grating periods,or increasing the laser power,raised the first-order diffraction efficiency of the gratings,and the mechanisms were analyzed briefly.In addition,a new method of fabricating nano-ribbons by femtosecond laser was presented.
Keywords:laser technique  femtosecond laser  gratings  diffraction efficiency  ablation
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