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Si/SiGe/Si HBT的直流特性和低频噪声
引用本文:廖小平,张中平. Si/SiGe/Si HBT的直流特性和低频噪声[J]. 电子器件, 2003, 26(1): 22-24
作者姓名:廖小平  张中平
作者单位:东南大学微电子中心,南京,210096;东南大学微电子中心,南京,210096
摘    要:在对Si/SiGe/Si HBT及其Si兼容工艺的研究基础上,研制成功低噪声Si/SiGe/Si HBT,测试和分析了它的直流特性和低频噪声特性,为具有更好的低噪声性能的Si/SiGe/Si HBT的研究建立了基础。

关 键 词:Si/SiGe/Si HBT  直流特性  低频噪声
文章编号:1005-9490(2003)01-0022-03
修稿时间:2002-09-16

Si/SiGe/Si HBT''''s DC Characterization and Its Low-frequency Noise
LIAO Xiaoping,?? ?? ZHANG Zhongping. Si/SiGe/Si HBT''''s DC Characterization and Its Low-frequency Noise[J]. Journal of Electron Devices, 2003, 26(1): 22-24
Authors:LIAO Xiaoping  ?? ?? ZHANG Zhongping
Affiliation:Southeast University
Abstract:Based on the researches on Si/SiGe/Si HBT and its compatibility with Si process, one low noise Si/SiGe/Si HBT construction is fabricated. The HBT's DC characterization and its low frequency noise are measured and analyzed. Based on above researches, the better low noise Si/SiGe/Si HBT will be made out.
Keywords:Si/SiGe/Si HBT  DC characterization  low frequency noise
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