键合工具对超声换能器系统谐振频率的影响

建立了超声引线键合机换能器系统振动分析有限元模型,利用ANSYS软件分析了换能器系统与键合工具组成的纵-弯复合振动系统的振动特性。计算结果表明,键合工具的弯曲振动与换能器系统纵向振动存在耦合关系,劈刀长度增加50%将使换能器系统谐振频率下降5.6%;实验中测试了换能器系统的阻抗与导纳特性,发现当劈刀长度为16 mm时系统的阻抗匹配较为理想;换能器系统的谐振频率的实测值与有限元分析结果一致,最大误差为3.51%。

Effects of Bonding Tool on Resonance Frequency of Transducer System

A finite element model of vibration analysis of transducer system for ultrasonic wire-bonding was established.The vibration characters of longitudinal-bending composite vibration system composed of transducer and bonding tool was analyzed by using ANSYS software.The analysis results showed that coupling relations between bending vibration of bonding tool and longitudinal vibration of transducer system existed.The resonance frequency of transducer system will decrease 5.6% when capillary length increases 50%.In experiment,the impedance and admittance properties of transducer system were measured.It was found that the impedance of system matched well when the value of capillary length was 16 mm.The resonance frequency of transducer system measured in the experiment coincided well with that of the finite element analysis and the maximum error was 3.51%.