白光干涉表面结构测量仪的优化设计与应用

为测量微机电系统的表面结构,研制了一种基于白光干涉法的表面结构测量仪。设计了显微干涉仪,通过实验分析了显微干涉仪关键设计参数中的光源带宽、物镜数值孔径、孔径光阑大小对垂直扫描白光显微干涉测量中干涉条纹光强分布的影响;设计了Z向一维位移工作台,提出了一种以显微干涉图像灰度值归一化标准方差为依据的白光干涉测量条纹自动搜索定位方法。相关实验结果为白光干涉表面结构测量仪的优化设计提供了参考依据。

Optimal Design and Application of White Light Interferometer for Surface Texture

An instrument for surface texture measurement was developed based on white interference method for surface texture measurement of MEMS.A micro interferometer was designed.The influence of key design parameters of the micro interferometer such as light source bandwidth,objective numerical aperture,and pore aperture size to the light intensity distribution of interference fringe of vertical scanning white microscopy interference measurement was analyzed by experiments.A 1D displacement worktable of Z direction was designed,an automatic search and location method of fringe of white light interference measurement based on the normalized standard deviation of gray value of interference microscopy images was proposed.The correlative experiment results pro-vide reference for the optimal design of white light micro interferometer for surface texture.