基于斯托克斯椭偏测量系统的多点定标法

斯托克斯椭偏仪可快速测量光束的偏振态，仪器矩阵的精确测量是斯托克斯椭偏仪一项非常重要的技术。为提高仪器矩阵的测量精度，基于四点定标法，提出了斯托克斯椭偏测量系统的多点定标法，并从理论上证明了该方法。在多点定标法的基础上采用六点定标法进行实验验证，结果表明采用多点定标法对系统定标是完全可行的，为斯托克斯椭偏仪的定标提供了新思路。同时六点定标法比四点定标法以及E-P定标法所获得的仪器矩阵更准确，在测量精度方面，该方法获得的斯托克斯参数的总均方根(RMS)偏差为3.15%。

Multi-Point Calibration Method Based on Stokes Ellipsometry System

Stokes ellipsometer can quickly measure polarization state of light beam. Accurate measurement of instrument matrix is one of the most important technology in stokes ellipsometer. In order to improve measurement accuracy of the instrument matrix, a method of multi-point calibration for stokes ellipsometry system is proposed and is proved in theory. Six-point calibration method based on multi-point calibration method is used on the system, which is verified by experiment. Results show that using multi-point calibration method calibration of the system is entirely feasible. It provides a new approach for calibration of Stokes ellipsometer, and six-point calibration method is more accurate than standard of four-point and E-P calibration method in acquiring matrix of the instrument. In measurement accuracy, the total root-mean-square (RMS) deviation of Stokes parameters is 3.15%.