Research, development and manufacturing plans at CAMD |
| |
| Authors: | C Khan Malek H Manohara V Saile |
| |
| Affiliation: | (1) Center for Advanced Microstructures and Devices (CAMD), Louisiana State University, 3990 West Lakeshore Drive, Baton Rouge, LA 70803, USA, US |
| |
| Abstract: | The X-ray micromachining activities at CAMD are described. Through the HI-MEMS Alliance Program, CAMD has developed an extensive
technical infrastructure and process experience. The “X-ray Print-Shop” supports prototyping and is prepared for cost effective
low-to-medium volume production of primary parts with high aspect ratio, including exposure of multiple level devices with
alignment, as well as tilted and rotated exposures. Important lessons learnt during the course of the program will be reported.
An up-grade of the facility to install a 7.5 Tesla superconducting wiggler in the ring is in progress. It will produce hard
X-rays for ultra-deep X-ray lithography.
Received: 25 August 1997/Accepted: 3 September 1997 |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
