| 带膜微通道板的工艺和特性研究 |
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| 引用本文： | 闫金良.带膜微通道板的工艺和特性研究[J].红外技术,2003,25(4):84-87. |
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| 作者姓名： | 闫金良 |
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| 作者单位： | 烟台师范学院物理系,山东,烟台,264025 |
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| 摘 要： | 微通道板(MCP)电子透射膜是决定Ⅲ代微光像管稳定性和可靠性的主要因素。采用有机衬底掩膜技术和冷基底溅射相结合的方法在MCP输入面制备非晶态Al2O3电子透射膜，测量了带膜MCP紫外光辐照清洗前后的电学特性。讨论在多孔MCP输入面形成连续电子透射膜与气体辉光放电的关系，工艺失败对MCP的危害性。
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| 关 键 词： | 微通道板 MCP 电子透射膜 气体辉光放电 微光像管 |
| 文章编号： | 1001-8891(2003)04-0084-04 |
| 修稿时间： | 2002年12月4日 |
Technology and Performance of Filmed Microchannel Plate |
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| YAN Jin-liang.Technology and Performance of Filmed Microchannel Plate[J].Infrared Technology,2003,25(4):84-87. |
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| Authors: | YAN Jin-liang |
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| Abstract: | Stability and reliability of third generation image tubes depend on electron transmission film at the input of MCP. Amorphous Al 2O 3 electron transmission film at the input of MCPs have been developed by using a new method combining the organic substrate technique with the cold basement sputtering. Some electric performance of filmed MCPs are measured before and after ultraviolet radiation cleaning. The relation between continuous film forming at the input of porous MCP and glow discharge of the gases is discussed, and the harm of failure processing to MCP is analyzed. |
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| Keywords: | microchannel plate electron transmission film image tube |
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