Process observation for the assembly of hybrid micro systems

The automation of micro assembly is becoming more and more important in micro technology. Especially the demands on handling and process observation of hybrid micro systems with optical and mechanical functions are quite high. Because of this process monitoring is inevitably necessary for a better understanding of what is really happening in the micro world. Process visualisation is very important in (micro electronic and mechanical systems) MEMS but does not guarantee an operative micro system. Therefore, instruments for quality control are required to secure a safe and reproducible assembly. The aim of this article is to give an overview over so far used and new devices for process observation and quality control.The authors gratefully acknowledge the financial support of the Deutsche Forschungsgemeinschaft (DFG) within the Collaborative Research Centre (SFB) 440 Assembly of hybrid microsystems.