|
|||||
|
|
The Model of the Process of the Chemical Mechanical Polishing of the Copper Metallization,Based on the Formation of the Passivation Layer |
|
| Authors: | T M Makhviladze M E Sarychev |
| Affiliation: | 1.Institute of Physics and Technology,Russian Academy of Sciences,Moscow,Russia |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |