| 热丝碳化促进CVD金刚石成核增强的物理机制 |
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| 引用本文： | 邱东江,吴惠桢,石成儒,徐晓玲,郝天亮. 热丝碳化促进CVD金刚石成核增强的物理机制[J]. 功能材料, 2002, 33(1): 46-48 |
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| 作者姓名： | 邱东江 吴惠桢 石成儒 徐晓玲 郝天亮 |
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| 作者单位： | 浙江大学物理系,浙江,杭州,310028;浙江大学中心实验室,浙江,杭州,310028 |
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| 基金项目： | 浙江省自然科学基金资助项目（596030） |
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| 摘 要： | 采用扫描电镜、X射线衍射及喇曼光谱等手段研究了HFCVD过程中热丝碳化对金刚石成核特性的影响。热丝经充分碳化后能发射出更多热电子,进而从反应气体中激发出更多原子H和CH3^ ,使金刚石晶核的孕育期大为缩短,3min内即可在未经表面预处理Si衬底上获得10^10cm^-2以上的高晶核密度。
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| 关 键 词： | 热丝碳化 金刚石 成核 |
| 文章编号： | 1001-9731(2002)01-0046-03 |
| 修稿时间： | 2000-12-08 |
Mechanism of diamond nucleation enhancement by filament carburization in HFCVD process |
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| QIU Dong-jiang,WU Hui-zhen,SHI Cheng-ru,XU Xiao-ling,HAO Tian-liang. Mechanism of diamond nucleation enhancement by filament carburization in HFCVD process[J]. Journal of Functional Materials, 2002, 33(1): 46-48 |
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| Authors: | QIU Dong-jiang WU Hui-zhen SHI Cheng-ru XU Xiao-ling HAO Tian-liang |
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| Affiliation: | QIU Dong-jiang,WU Hui-zhen,SHI Cheng-ru,XU Xiao-ling1,HAO Tian-liang |
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| Abstract: | The mechanism of diamond nucleation enhancement by filament carburization in the hot filament chemical vapor deposition (HFCVD) process was investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy. The deeply carburized filament can emit far more hot electrons, which is essential to enhance its decomposition efficiency to the reaction gas mixtures. As a result, the duration of diamond nuclei incubation can be significantly shortened, and the nuclei density of diamond as high as 1010cm-2 can be easily achieved within 3min. |
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| Keywords: | hot-filament carburization diamond nucleation |
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