| 使用差分方法消除微机电滤波器的穿通以及对由此引入的陷波现象的分析 |
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| 引用本文： | 韩国威,司朝伟,宁瑾,钟卫威,孙国胜,赵永梅,杨富华. 使用差分方法消除微机电滤波器的穿通以及对由此引入的陷波现象的分析[J]. 半导体学报, 2013, 34(4): 045006-6 |
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| 作者姓名： | 韩国威 司朝伟 宁瑾 钟卫威 孙国胜 赵永梅 杨富华 |
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| 作者单位： | Institute of Semiconductors,Chinese Academy of Sciences;State Key Laboratory of Transducer Technology |
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| 基金项目： | 国家863高技术研究发展计划资助项目 |
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| 摘 要： | This paper presents and analyzes a notch observed in MEMS(micro electric mechanical system) filter characterization using the difference method.The difference method takes advantage of the cancellation of parasitic feed-through,which could potentially obscure the relatively small motional signal and lead to failure in characterization of the MEMS components.In this paper,typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method.Using the difference method a better performance is obtained but a notch is induced as a potential problem.Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch.The relevant circuit design rule is also proposed to avoid the notch in the difference method.
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| 关 键 词： | MEMS filter feed-through cancellation difference method notch |
| 收稿时间： | 2012-08-25 |
| 修稿时间： | 2012-11-02 |
Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch |
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| Han Guowei,Si Chaowei,Ning Jin,Zhong Weiwei,Sun Guosheng,Zhao Yongmei and Yang Fuhua. Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch[J]. Chinese Journal of Semiconductors, 2013, 34(4): 045006-6 |
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| Authors: | Han Guowei Si Chaowei Ning Jin Zhong Weiwei Sun Guosheng Zhao Yongmei Yang Fuhua |
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| Affiliation: | Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory of Transducer Technology, Beijing 100190, China |
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| Abstract: | This paper presents and analyzes a notch observed in MEMS (micro electric mechanical system) filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in characterization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method. |
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| Keywords: | MEMS filter feed-through cancellation difference method notch |
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