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二氧化钒复合薄膜太赫兹透射率模拟
引用本文:王旭,陈思宏,高敏,林媛.二氧化钒复合薄膜太赫兹透射率模拟[J].电子元件与材料,2020(5):55-59.
作者姓名:王旭  陈思宏  高敏  林媛
作者单位:电子科技大学电子薄膜与集成器件国家重点实验室
基金项目:国家自然科学基金(51872038)。
摘    要:二氧化钒(VO2)是一种具有可逆热致相变性质的材料,在太赫兹调制领域具有应用潜力。为了确认VO2复合薄膜对太赫兹调控的可行性,在进行相关实验之前,首先运用CST Studio Suite电磁仿真软件进行模拟研究,主要探究了VO2及其与金属光栅结合的复合薄膜的相关参数对太赫兹透射及调控的影响。仿真结果表明,VO2能很好地调控太赫兹的透射幅度,调控深度可由相变幅度控制。另外仿真发现,对VO2复合薄膜而言,通过控制光栅的参数变化可以改变太赫兹透射幅度,并且可以通过调控光栅周期实现对太赫兹调制深度控制。

关 键 词:二氧化钒  金属光栅  太赫兹调制  透射率  仿真

Simulation of terahertz transmittance of vanadium dioxide composite film
WANG Xu,CHEN Sihong,GAO Min,LIN Yuan.Simulation of terahertz transmittance of vanadium dioxide composite film[J].Electronic Components & Materials,2020(5):55-59.
Authors:WANG Xu  CHEN Sihong  GAO Min  LIN Yuan
Affiliation:(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China)
Abstract:Vanadium dioxide is a material with reversible thermo-induced phase transition properties and has potential application in the field of terahertz modulation. In order to confirm the feasibility of terahertz control of vanadium dioxide composite thin film, CST Studio Suite electromagnetic simulation software was used to do simulation research before carrying out relevant experiments, the effects of related parameter of VO2 and its composite thin film on terahertz transmission and regulation were investigated. The simulation results show that VO2 can well regulate the transmission amplitude of terahertz, and the modulation depth can be controlled by the phase change amplitude. In addition, it was found that for composite films, the terahertz transmission amplitude can be changed by controlling the parameters of the grating, and the terahertz modulation depth can be controlled by adjusting the grating period.
Keywords:vanadium dioxide  metal grating  terahertz modulation  transmittance  simulation
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