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Microhardness of carbon-doped (111) p-type Czochralski silicon |
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| Authors: | Steven Danyluk Dae Soon Lim Juris Kalejs |
| Affiliation: | (1) Department of Civil Engineering, Mechanics and Metallurgy, University of Illinois at Chicago, 60680 Chicago, Illinois, USA;(2) Mobil Solar Energy Corporation, 15 Hickory Drive, Waltham, Massachusetts, USA |
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