| 膜厚对FeCoAlON薄膜的静态与动态磁性的影响 |
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| 引用本文： | 郑富,陈治鹏,马亚楠,周俊. 膜厚对FeCoAlON薄膜的静态与动态磁性的影响[J]. 磁性材料及器件, 2017, 0(6): 1-4,18. DOI: 10.3969/j.issn.1001-3830.2017.06.001 |
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| 作者姓名： | 郑富 陈治鹏 马亚楠 周俊 |
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| 作者单位： | 1. 宁夏大学 物理与电子电气工程学院,宁夏银川,750021;2. 西南应用磁学研究所,四川绵阳,621000 |
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| 基金项目： | 宁夏大学博士科研启动基金资助项目项目，宁夏回族自治区自然科学基金资助项目 |
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| 摘 要： | 采用射频磁控溅射法在Si(100)基片上沉积了不同氮分压和不同厚度的(Fe70.6Co29.4)88.2Al11.8-ON薄膜,研究了膜厚对5%氮分压沉积的薄膜静态与动态磁性的影响。当FeCoAlON薄膜的厚度较小时,薄膜表现出面内单轴磁各向异性,当薄膜厚度增加到210 nm时,薄膜出现了条形畴。动态磁性研究显示,对于面内单轴磁各向异性以及条形畴结构的FeCoAlON薄膜,都表现出优异的高频响应。特别地,对于具有条形畴结构的FeCoAlON薄膜,其磁谱曲线表现为多峰共振的特点。
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| 关 键 词： | FeCoAlON薄膜 膜厚 条形畴结构 磁性 |
Effects of film thickness on the static and dynamic magnetic properties of FeCoAlON films |
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| Abstract: | (Fe70.6Co29.4)88.2Al11.8-ON films with different nitrogen partial pressure and thickness were deposited on Si(100) substrate by RF magnetron sputtering. The effects of film thickness on the static and dynamic magnetic properties of (Fe70.6Co29.4)88.2Al11.8-ON films with 5 % nitrogen partial pressure have been investigated. The films with small film thickness show an in-plane uniaxial anisotropy. While with the film thickness increasing to 210 nm, the films show stripe domain structures. High frequency studies show that the FeCoAlON films with both in-plane uniaxial anisotropy and stripe domain structures exhibit an excellent high frequency response of permeability. In particular, for the films with stripe domain structures, the permeability spectra display multiple-peak resonance characteristics. |
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| Keywords: | FeCoAlON films film thickness stripe domain structures magnetic properties |
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