| 激光镜镜面粗糙度的干涉测量 |
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| 引用本文： | 张耀宁,程祖海.激光镜镜面粗糙度的干涉测量[J].中国激光,1999,26(2):141-144. |
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| 作者姓名： | 张耀宁 程祖海 |
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| 作者单位： | 华中理工大学激光技术国家实验室,武汉,430074 |
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| 摘 要： | 开发了一种激光镜镜面粗糙度的全场、非接触干涉测量方法。测量了两面不同粗糙度的铜镜，测出的数据和用６ＪＡ型显微干涉轮廓仪测量的结果相吻合。测量的范围为０．０１～０．１２μｍ，理论上测量的精度可达０．００２μｍ。它对镜面抛光过程的控制有实际意义
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| 关 键 词： | 干涉测量，粗糙度，激光镜 |
| 收稿时间： | 1997/11/24 |
Interference Measurements for Roughness of Laser Mirrors |
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| Zhang Yaoning,Cheng Zuhai.Interference Measurements for Roughness of Laser Mirrors[J].Chinese Journal of Lasers,1999,26(2):141-144. |
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| Authors: | Zhang Yaoning Cheng Zuhai |
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| Abstract: | A full-field, noncontacting interference measurement for roughness of laser mirrors has been developed. Suppose the probability density function of the surface height distribution is Gaussian. The relationship between the interference fringes contrast and the ronghness of a mirror is deduced. Two laser mirrors with different roughnesses were measured. The data measured are in agreement with the results measured with a 6JA Microscopic Interference Profilometer. The range of measurement is 0.01 to 0.12 μm and the accuracy of measurement is up to 0.002 μm theoretically. Practically, this work may be useful for controlling the process of mirror polishing. |
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| Keywords: | interference measurement roughness laser mirror |
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