Examination of flying height of magnetic head slider in simulations and measurements at nanometer-order spacing |
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Authors: | Yoshinori Takeuchi Katsuyuki Tanaka Toshiko Odaka Fumitaka Muranushi |
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Affiliation: | 1. Slider Engineering Department, Hitachi Global Storage Technologies, 2880 Kozu, Odawara-shi, Kanagawa, 256-8510, Japan 2. Department of Mechanical System Engineering, School of Engineering, University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8603, Japan 3. EX-Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki, 300-0013, Japan
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Abstract: | This paper describes a comparison with the experimental flying heights and the simulated flying heights, which were calculated by using the linearized Boltzmann equation and the conventional modified Reynolds equations. The experiments were measured under the ambient pressure from atmospheric pressure to 6.7 × 10?3 MPa. The calculated results of the linearized Boltzmann equation were almost the same as the experimental results from the high spacing range to the low spacing range of 10 nm. At the slider spacing of 10 nm, it was confirmed that the difference between the experimentally measured results and the calculated results of the linearized Boltzmann equation was less than 5%, and the differences in the conventional slip flow approximation equations were over 30%. |
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