The range of penetration and the backscattering coefficient by using both the analytic and the stochastic theoretical ways of electron slowing down in solid targets: Comparative study

The aim of this paper is to determine the best theoretical way (stochastic or analytic) to use in the study of the range of penetration and the backscattering coefficient of electron impinging in solid target, by adopting the same input in the form of collision cross-sections. For this purpose, differential elastic cross sections has been calculated by using our semi-empirical model [A. Bentabet, Z. Chaoui, A. Aydin, A. Azbouche, Vacuum 85 (2010) 156]; and that of inelastic cross sections has been calculated by using Gryzinski’s excitation function. Moreover, in stochastic case, the obtained quantities are calculated by using both Monte Carlo schemes based on continuous slowing down approximation (CSDA) and on individual electron scattering events methods.