| W/Mo超晶格薄膜的微结构研究 |
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| 引用本文： | 李戈扬,张流强,许俊华,吴亮,李鹏兴,顾明元.W/Mo超晶格薄膜的微结构研究[J].材料工程,1999(3):24-27. |
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| 作者姓名： | 李戈扬 张流强 许俊华 吴亮 李鹏兴 顾明元 |
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| 作者单位： | 1. 上海交通大学金属基复合材料国家重点实验室,上海,200030
2. 中科院上海冶金研究所,上海,200050 |
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| 摘 要： | 纳米多层膜因常出现物理或力学性能的异常而成为薄膜研究的热点之一。采用ＸＲＤ和ＴＥＭ技术研究了Ｗ／Ｍｏ纳米多层膜微结构。结果表明，Ｗ和Ｍｏ由于同为体心立方结构，且晶格常数相近，由它们交互重叠形成的纳米多层膜具有柱状晶穿过调制界面外延生长的结构特征，形成多晶超晶格结构。
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| 关 键 词： | W/Mo纳米多层膜 超晶格 磁控溅射 |
A Study on the Microstructure of W/Mo Superlattice Thin Films |
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| Li Geyang,Zhang Liuqiang,Xu Junhua,Wu Liang,Li Pengxing,Gu Mingyuan.A Study on the Microstructure of W/Mo Superlattice Thin Films[J].Journal of Materials Engineering,1999(3):24-27. |
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| Authors: | Li Geyang Zhang Liuqiang Xu Junhua Wu Liang Li Pengxing Gu Mingyuan |
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| Abstract: | The research on the nano multilayer films
has attracted wide attention because of their anormal properties in physics and mechanics
The microstructure of the W/Mo nano multilayer film has been investigated by means of XRD
and TEM in this paper It is shown that,due to W and Mo having the same BCC structure with
approximately lattice constant,columnlar grains grow through modulaion interface in the way of
epitaxy, forming polycrystal superlattice in the nano multilayer films |
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| Keywords: | W/Mo nanomultilayers superlattice magnetron sputtering |
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