Sensor Properties of Pd-Doped SnO2 Films Deposited by Laser Ablation

Polycrystalline SnO₂ and SnO₂ films were surface-doped with palladium using laser ablation. The effect of the energy density of pulsed KrF laser radiation on the plasma generation process and Pd deposition rate was studied, and the depth profiles of Pd in the films were determined. The gas response of the Pd/SnO₂, SnO₂, and Pd/SnO₂ films was studied between 200 and 380°C using a mixture of 1 vol % H₂ with N₂. Surface doping with Pd was found to enhance the hydrogen sensitivity of SnO₂ by two orders of magnitude.