| 硅基波导、光探测器和CMOS电路的集成 |
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| 引用本文： | 郑显明. 硅基波导、光探测器和CMOS电路的集成[J]. 半导体光电, 1997, 18(3): 171-174 |
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| 作者姓名： | 郑显明 |
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| 作者单位： | 重庆光电技术研究所 |
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| 摘 要： | 对于集成光学器件和微电子电路制作，应用了驻波监控指示技术（ＳＷＡＭＩ）、局部氧化技术（ＬＯＣＯＳ）、光波导和探测器的平接、漏波，以及镜耦合技术。文章介绍了硅基光波导、光探测器和ＣＭＯＳ电路的单片集成技术。讨论了集成工艺以及静态和动态测量结果
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| 关 键 词： | 半导体工艺 集成光学 光波导 特性测试 单片集成技术 电光耦合 |
Integration of waveguides and photodetectors with CMOS circuits on silicon |
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| ZHENG Xianming. Integration of waveguides and photodetectors with CMOS circuits on silicon[J]. Semiconductor Optoelectronics, 1997, 18(3): 171-174 |
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| Authors: | ZHENG Xianming |
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| Abstract: | The SWAMI,LOCOS techniques,and techniques of butt,leaky wave and mirror coupling for optical waveguides and photodetectors are applied to fabricate integrated optic devices and microelectronic circuits.Monolithic integration technique for optical waveguides and photodetectors with CMOS circuits on silicon is presented in this paper.The integration technology and results of static and dynamic measurements are discussed. |
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| Keywords: | Semiconductor Technology Integrated Optics Optical Waveguide Characteristic Measurement Monolithic Integration Technique Electrooptical Coupling |
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