Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization |
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| Authors: | Hiroaki Mochizuki Harutaka Mekaru Shinji Kusumi Noriaki Sato Masami Shimizu Michiru Yamashita Osamu Shimada Tadashi Hattori |
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| Affiliation: | (1) Graduate School of Engineering, University of Hyogo, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan;(2) Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan;(3) SUSUMU Co., Ltd., 14 Umamawashi-cho, Kamitoba, Minami-ku, Kyoto 601-8177, Japan;(4) Juken Kogyo Co., Ltd., 140-1 Kita Komukai, Komukai-cho, Toyohashi, Aichi 441-8003, Japan;(5) Hyogo Prefectural Institute of Technology, 3-1-12 Yukihira-cho, Suma-ku, Kobe 654-0037, Japan |
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| Abstract: | Investigations of microactuators are actively being pursued in various viewpoint, researchers are exploring output energy sources such as electrostatic, piezoelectric, electromagnetic and etc. We focus attention recently on the electromagnetic microactuator. In generally, electromagnetic actuator is not well suited to miniaturization because of decreased output force when miniaturized. However, we have already developed 3D-LIGA process to produce a spiral microcoil in 2003. Then, the production process of a smaller and higher output force microactuator was devised based on this technology. |
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| Keywords: | Microactuator Actuator Solenoidal Electromagnetic Ampere turns Spiral microcoil X-ray lithography LIGA |
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