电磁驱动型MEMS安全保险装置关键技术研究

MEMS（Micro Electronic Mechanical System）安全保险装置是用于保护“要害系统”安全性的器件。本文电磁驱动型MEMS安全保险装置由驱动器、鉴码机构和耦合器构成。通过轴向磁场微电机驱动鉴码机构实现密码的鉴别。利用MEMS技术的安全保险装置具有可靠性高、误解码率低、外型微小等特点。以准LIGA加工工艺形成光、光纤、光电多种耦合方式的MEMS安全保险装置，并且具有单次试开与多次试开形式。并阐述了其在信息安全上的应用。

The Core Technology Research of MEMS Safety Device Driven by Electromagnetic Field

MEMS satety device is a instrument for high-consequence systems.This paper discusses the MEMS(Micro Electronic Mechanical System)safety device which is constructed by drivers,discriminator and energy-coupling element.The MEMS safety device checks the code through discriminator driven by axial flux permanent magnet micromotors.The safety device designed by MEMS technology is reliable,has low probality and small dimension.The light,optical fiber and photoelectricity coupling MEMS safety device is developed by UV-like process and has sigle-try and multi-try forms.