| 一种高精度小孔圆度检测方法研究 |
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| 引用本文： | 邓健男,安志勇,祁金秋,王劲松.一种高精度小孔圆度检测方法研究[J].长春理工大学学报,2014(1):58-60,64. |
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| 作者姓名： | 邓健男 安志勇 祁金秋 王劲松 |
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| 作者单位： | 长春理工大学 光电工程学院,长春130022 |
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| 摘 要： | 介绍了一种用于短小孔内表面圆度检测方法。提出基于激光共焦测距原理，应用旋转反射镜转化并消除径向跳动误差及传感器振动误差的新技术。成功地检测了标准孔径表面圆度，实验结果表明，该方法可以使小孔圆度检测误差不大于0.3μm，大大提高了小孔圆度检测的精度。
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| 关 键 词： | 圆度 径跳 共焦位移传感器 旋转反射镜 |
A High Precision Detection Method for Hole Roundness |
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| DENG Jiannan,AN Zhiyong,QI Jinqiu,WANG Jinsong.A High Precision Detection Method for Hole Roundness[J].Journal of Changchun University of Science and Technology,2014(1):58-60,64. |
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| Authors: | DENG Jiannan AN Zhiyong QI Jinqiu WANG Jinsong |
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| Affiliation: | (School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022) |
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| Abstract: | In this paper,a method for the short hole surface roundness detection method is introduced. The new tech-nology based on laser confocal ranging principle is proposed, whcih applies the rotating mirror into to transform and eliminate the diameter jump error and sensor vibration error. The surface roundness of standard aperture is detected suc-cessfully. The experimental results show that the hole roundness detection error can be less than 0.3μm and the detec-tion accuracy of hole roundness is greatly improved. |
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| Keywords: | roundness radial runout confocal displacement meter rotating mirror |
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