| VO_2薄膜的制备及表征 |
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| 引用本文： | 王燕,黄维刚.VO_2薄膜的制备及表征[J].电子元件与材料,2009,28(2). |
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| 作者姓名： | 王燕 黄维刚 |
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| 作者单位： | 四川大学,材料科学与工程学院,四川,成都,610065 |
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| 基金项目： | 四川省科技厅资助项目 |
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| 摘 要： | 综述了目前VO2薄膜主要的制备方法(sol-gel法,蒸发法,脉冲激光沉积,溅射法和CVD)及其优缺点;以及X射线技术、光电子能谱、光谱技术、显微技术等表征手段在VO2薄膜研究中的应用。如何方便地获得准确化学计量的VO2,获得结晶性好的薄膜结构以及与基体间具有良好结合力的制备方法,是今后关注的问题。
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| 关 键 词： | 无机非金属材料 VO2薄膜 综述 制备方法 表征 |
Preparation and characterization technology of vanadium dioxide film |
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| WANG Yan,HUANG Weigang.Preparation and characterization technology of vanadium dioxide film[J].Electronic Components & Materials,2009,28(2). |
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| Authors: | WANG Yan HUANG Weigang |
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| Affiliation: | College of Materials Science and Engineering;Sichuan University;Chengdu 610065;China |
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| Abstract: | Introduced was the preparing mehod of VO2 thin film including sol-gel method, evaporation method, PLD, Sputtering method and CVD. Advantage and shortcoming of these methods were also discussed. The structure and properties of the VO2 thin films were characterized by X-ray analysis techniques, photoelectric spectroscopy techniques, spectral analysis techniques and micro-spectroscopy analysis. It remains to be further question that the preparation methods for easily and accurately obtaining the VO2 of stoichi... |
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| Keywords: | non-metallic inorganic materials vanadium dioxide film review preparation method characterization |
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