| Al含量对电弧离子镀共沉积Ti1-xAlxN涂层性能的影响 |
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| 引用本文： | 王海东,童洪辉,沈丽如,金凡亚,徐桂东.Al含量对电弧离子镀共沉积Ti1-xAlxN涂层性能的影响[J].热加工工艺,2006,35(8):4-6. |
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| 作者姓名： | 王海东 童洪辉 沈丽如 金凡亚 徐桂东 |
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| 作者单位： | 1. 核工业西南物理研究院,四川,成都,610041;深圳盈创真空镀膜有限公司,广东,深圳,518052
2. 核工业西南物理研究院,四川,成都,610041 |
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| 摘 要： | 利用扫描电镜、X射线衍射仪、显微硬度计、划痕仪、磨损实验仪等,研究了不同铝含量的Ti1-xAlxN涂层性能.结果表明：当铝含量约为52%时,经涂层处理试样的显微硬度、摩擦磨损性能都得到了很大的提高,能达到使用钛铝合金靶离子镀Ti1-xAlxN涂层的相应性能,而从经济性来说,利用独立钛、铝靶比钛铝合金靶制备Ti1-AlxN涂层的成本要低得多,从而具有降低生产成本,提高生产效益的优势.
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| 关 键 词： | 电弧离子镀 高速钢 TiAlN涂层 |
| 文章编号： | 1001-3814（2006）08-0004-03 |
| 收稿时间： | 2006-03-23 |
| 修稿时间： | 2006年3月23日 |
Effect of Al Content on Properties of Ti1-xAlxN Coatings Deposited by Cathodic Arc Evaporation with Independent Ti and Al Targets |
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| WANG Hai-dong,TONG Hong-hui,SHEN Li-ru,JIN Fan-ya,XU Gui-dong.Effect of Al Content on Properties of Ti1-xAlxN Coatings Deposited by Cathodic Arc Evaporation with Independent Ti and Al Targets[J].Hot Working Technology,2006,35(8):4-6. |
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| Authors: | WANG Hai-dong TONG Hong-hui SHEN Li-ru JIN Fan-ya XU Gui-dong |
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| Affiliation: | 1.Southwestern Institue of Physics, Chengdu 610041 ,China; 2.Shenzhen Enstrong Vacuum Coating Co. Ltd, Shenzhen 518052 ,China |
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| Abstract: | Microstroctures, vickers hardness, bonding strength and wear resistance of the coatings wore charactcrizd by SEM, XRD, micro-indentation, scratch and pin-on-disc wear testers. The results show that the micro-hardness is largely increased but the friction coefficient is quietly decreased at the 52% of Al content in the coatings. No distinct differences in comparison with the Ti-Al alloy target deposition on the properties are detected .In the economical aspects, the cost of Ti1-xAlxN deposition with independent Ti and Al targets is much lower than it with Ti-Al alloy target. Therefore, the production cost is decreased. |
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| Keywords: | cathodic arc evaporation high-speed steel TiAlN coatings |
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