| 线光栅扫描实现衍射图形的矢量化直写 |
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| 引用本文： | 魏国军,徐兵,陈林森.线光栅扫描实现衍射图形的矢量化直写[J].大气与环境光学学报,2004(6). |
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| 作者姓名： | 魏国军 徐兵 陈林森 |
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| 作者单位： | 苏州大学信息光学工程研究所，苏州大学信息光学工程研究所，苏州大学信息光学工程研究所 江苏 苏州 215006，江苏 苏州 215006，江苏 苏州 215006 |
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| 摘 要： | 在双光束激光直写系统中,衍射光变图像的光刻是逐像素点进行的.本文提出在该系统中采用狭缝获得光栅线来进行衍射图形的直写,利用一种改进的矢量文件格式,使平台沿着垂直光栅线的方向运动,获得连续的多光点同时直写,直写后的衍射光栅线是连续的,系统的运行效率是逐点光刻的几十倍.编写了与DXF文件的接口直写控制程序,给出了实验结果.
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| 关 键 词： | 激光直写 双光束干涉 DXF文件 矢量文件 衍射光变图像 |
Vectorized Laser Direct Writing of DOVID's with Line-grating Scanning |
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| WEI Guo-jun,XU Bing,CHEN Lin-sen.Vectorized Laser Direct Writing of DOVID''''s with Line-grating Scanning[J].Journal of Atmospheric and Environmental Optics,2004(6). |
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| Authors: | WEI Guo-jun XU Bing CHEN Lin-sen |
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| Abstract: | The diffraction optical variable image device ( DOVID) is written dot by dot on laser diret t writing system with double beams interference. A new method of writing gratings on DOVID was proposed based on the multi-dot scanning on the line-grating slot. The line-grating slot yielded the continuous diffraction grating lines on the photoresist plate when stage was driven along the vertical direction of line-grating slot. An improved vector file was defined for the laser direct writing system. The experimental results are given. |
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| Keywords: | laser direct writing double beams interference DXF file vector file DOVID |
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