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Synthesis and characterization of metal oxide multilayers obtained via MOCVD as protective coatings of graphite against oxidation |
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| Authors: | G. Carta G. Rossetto P. Zanella S. Battaini S. Sitran P. Guerriero G. Cavinato L. Armelao E. Tondello |
| Affiliation: | a Istituto di Chimica e Tecnologie Inorganiche e dei Materiali Avanzati del CNR, Corso Stati Uniti 4, 35127, Padua, Italy b Dipartimento di Chimica Inorganica, Metallorganica ed Analitica, Centro di Studio sulla Stabilità e Reattività dei Composti di Coordinazione del CNR, University of Padova, Via Marzolo 1, 35131, Padua, Italy |
| Abstract: | Zirconia (ZrO2) titania (TiO2) and alumina (Al2O3) thin films were deposited on a graphite substrate both in mono- and in multi-layer systems, using the metal organic chemical vapor deposition technique, to test their practical qualities as protective coatings against oxidation at high temperatures. The depositions were performed using a hot wall reactor at reduced pressure (0.6 Torr) in the temperature range 350–500 °C, using, as precursors, (η5-C5H5)2Zr(CH2C(CH3)3)2, Ti(OCH(CH3)2)4, and (CH3CH2)2Al(OCCH3CHCCH3O), respectively. Surface and topographical analysis of the deposits using X-ray photoelectron spectroscopy, X-ray diffraction and scanning electron microscopy techniques as well as thermogravimetric measurements (TG and DTA) in an oxygen flux of mono- and multi-layer systems are reported and examined. |
| Keywords: | Graphite Metal organic chemical vapor deposition Metal oxides Protective coatings Oxidation Surface and thermogravimetric analyses |
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