旋转基板的激光测温

激光测温是一种先进的温度测量方法。它具有测量准确、反应速度快、非接触等特点 ,尤其适用于测量真空镀膜中基板的温度。但目前的测温对象只能是固定的基板 ,因而还不完全实用。我们新发展了一种自动测温系统 ,可以对旋转基板的干涉条纹移动进行计数 ,从而实现了旋转基板的测温 ,使激光测温技术更具实用性。介绍了该系统的原理、设计并给出了一次实际测温的结果

Measuring a rotating substrate temperature by laser

Temperature measurement by laser is an advanced method for measuring temperature.It has the advantage of accuracy,rapidity,non touching and is suitable for measuring the temperature of substrate in vacuum coating plants.But so far the object of measuring is limited to stationary plate.Recently we have developed an automatic measuring system which is able to measure the temperature of a rotating substrate by counting the movement of interference fringes formed by the substrate.The development makes the method more useful in practical coating process.The principle and design as well as a result of the system are presented.