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A design flow for micromachined electromechanical systems |
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| Authors: | Swart N.R. |
| Affiliation: | Analog Devices Inc., Cambridge, MA; |
| Abstract: | I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices. Several design examples of real-world devices are given |
| Keywords: | |