A silicon pressure sensor with a low-cost contactless interferometric optical readout

A novel miniature pressure sensor based on a silicon micromembrane with non-electric contactless readout of its deflection by low-cost integrated interferometric optical means (a simple ‘white’-light source and a special single-chip photodetector) has been elaborated. In contrast to the well-known piezoresistive or capacitive readout, the contactless optical approach will provide accurate measurements of absolute or differential pressure even in severe environments and at elevated temperatures. Preliminary experiments performed show the feasibility of such a sensor.