Study of Nano-Porous Silicon with Low Thermal Conductivity as Thermal Insulating Material

Recently discovered phenomenon of extremely low thermal conductivity of nano-porous silicon (nano-PS) is discussed in detail. A theoretical model describing specific mechanisms of heat transport in as-prepared and oxidized nano-PS layers is described. The theoretical estimations are in a good agreement with experimental data obtained earlier. The low thermal conductivity values allow to use this promising material as thermal insulator in microsensors and microsystems. To ensure an efficient thermal isolation, a nano-PS layer has to be as thick as possible and mechanically stable. We describe here the procedures to form thick (up to 200 m) and stable nano-PS layers. Distribution of Si oxidized fraction along the layer thickness after thermal oxidation in dry O₂ atmosphere at 300°C during 1 h is studied.