| Abstract: | Most vacuum manufacturing processes require some type of motion to take place within the chamber. A magnetic liquid sealed feedthrough is a device that transmits rotary motion into a vacuum chamber with minimal torque requirements and minimal contamination level. The are widely employed in high and ultra‐high vacuum conditions, such as: semiconductor fabrication industry, coating equipment, high power X‐ray generators, robotics applications and the others. In the paper is given principle of operation of a magnetic liquid seal and various standard and special designs of vacuum rotary feedthroughs, sealed with magnetic liquid are described. |
