| 溶胶 -凝胶法制备BST铁电薄膜及性能研究 |
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| 引用本文： | 赵敏张荣君,顾豪爽陈铭南. 溶胶 -凝胶法制备BST铁电薄膜及性能研究[J]. 红外与毫米波学报, 2001, 20(1): 73-76 |
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| 作者姓名： | 赵敏张荣君 顾豪爽陈铭南 |
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| 作者单位： | 同济大学应用物理系,;复旦大学光科学与工程系,;湖北大 学压电陶瓷研究所, |
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| 摘 要： | 研究了一种以水为溶剂的(Ba
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| 关 键 词： | BST薄膜 溶胶-凝胶法 介电性能 漏电流 |
| 修稿时间： | 2000-09-04 |
PREPARATION OF (Ba0.5Sr0.5)TiO3THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS |
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| ZHAO Min. PREPARATION OF (Ba0.5Sr0.5)TiO3THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS[J]. Journal of Infrared and Millimeter Waves, 2001, 20(1): 73-76 |
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| Authors: | ZHAO Min |
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| Abstract: | (Ba0.5Sr0.5)TiO3 ferroelectric t hin films were prepared by Sol-Gel processing. Films with thickness of 160nm t reated at 700℃ for 1h showed pure perovskite structure and good dielectric, ins ulating properties, i.e. a dielectric constant of 225, a dielectric loss of 0.04 4, a leakage current density of 8.0×10－8A/cm2. The leakage current density was found to depend on the annealing temperature. The measurement of the J-V characteristics on films indicated the conduction process to be bulk- limited. |
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| Keywords: | Ba 0.5 Sr 0.5 TiO 3 SOL GEL dielectric property leakage current. |
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