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NSR-1755i7A投影光刻机自动对准故障分析
引用本文:宋健,朱鹏,张文雅,雷宇. NSR-1755i7A投影光刻机自动对准故障分析[J]. 电子工业专用设备, 2008, 37(2)
作者姓名:宋健  朱鹏  张文雅  雷宇
作者单位:中国电子科技集团公司第十三研究所,石家庄,050051;清华同方,北京,100084
摘    要:
在半导体设备当中投影光刻机应是最为精密复杂的设备,其维修工作具有高度的技术性。论述了NSR1755i7A投影光刻机自动对准系统的工作原理,并分析了两例自动对准系统故障和排除故障的过程,最后提出对此类故障检查的一般原则。

关 键 词:分步重复  双频激光干涉  LSA

Trouble Shooting of NSR-1755i7A Stepper Auto Alignment System
SONG Jian,ZHU Peng,ZhANG Wen-ya,LEI Yu. Trouble Shooting of NSR-1755i7A Stepper Auto Alignment System[J]. Equipment for Electronic Products Marufacturing, 2008, 37(2)
Authors:SONG Jian  ZHU Peng  ZhANG Wen-ya  LEI Yu
Abstract:
The steppers are one of the most precise and complex semiconductor equipment, its repairing work possesses very high technological level. The aiticle expounds the principle of NSR1755i7 stepper auto alignment system, analyses two troubles of auto alignment system and the process of solving these troubles, and proposes the method of checking these troubles.
Keywords:LSA
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