| AlxGa1-xAs选择性湿法氧化技术的研究 |
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| 引用本文： | 黄静,郭霞,渠红伟,廉鹏,董立闽,朱文军,杜金玉,邹德恕,沈光地.AlxGa1-xAs选择性湿法氧化技术的研究[J].红外与激光工程,2003,32(6):647-650. |
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| 作者姓名： | 黄静 郭霞 渠红伟 廉鹏 董立闽 朱文军 杜金玉 邹德恕 沈光地 |
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| 作者单位： | 北京工业大学,电子信息和控制工程学院,北京市光电子技术实验室,北京,100022 |
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| 基金项目： | 国家973计划资助项目(G20000683 3) |
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| 摘 要： | 详细研究了温度和Al组分与AlxGa1-xAs横向氧化速率的关系,通过分析氧化机制和实验得到的氧化宽度与时间的线性关系,指出在较短时间内的氧化为受AlxGa1-xAs材料与水汽反应速率限制的过程。运用优化的氧化条件,成功制备了氧化孔径为8μm的垂直腔面发射激光器,最大直流光输出功率为3.2mW,激射波长为978nm,工作电流为15mA。
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| 关 键 词： | 垂直腔面发射激光器 AlxGa1-xAs 氧化 |
| 文章编号： | 1007-2276(2003)06-0647-04 |
| 收稿时间： | 2003/2/26 |
| 修稿时间： | 2003年2月26日 |
Study on AlxGa1-xAs selective wet oxidation technology |
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| HUANG Jing,GUO Xia,QU Hong-wei,LIAN Peng,DONG Li-min,ZHU Wen-jun,DU Jin-yu,ZOU De-shu,SHEN Guang-di.Study on AlxGa1-xAs selective wet oxidation technology[J].Infrared and Laser Engineering,2003,32(6):647-650. |
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| Authors: | HUANG Jing GUO Xia QU Hong-wei LIAN Peng DONG Li-min ZHU Wen-jun DU Jin-yu ZOU De-shu SHEN Guang-di |
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| Abstract: | The wet oxidation of buried AlxGa1-xAs was investigated. The oxidation character and the dependence of oxidation rate on the temperature and Al content have been studied in details. Through analyzing oxidation mechanism and linear relationship between oxidation length and time, it is educed that the lateral oxidation of AlxGa1-xAs, in relatively short oxidation time, is a reaction rate limit process. Based on the optimized parameters extracted, VCSEL with 8 μm oxidation aperature was produced, whose maximum optical power output is 3.2 mW, wavelength is 978 nm and driving current is 15 mA. |
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| Keywords: | VCSEL Al_xGa_(1-x)As Oxidation |
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