| 纳米粉预处理的CVD金刚石薄膜成核与生长研究 |
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| 引用本文： | 邵乐喜,谢二庆,贺德衍,陈光华,徐康.纳米粉预处理的CVD金刚石薄膜成核与生长研究[J].无机材料学报,1998,13(6):0-931. |
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| 作者姓名： | 邵乐喜 谢二庆 贺德衍 陈光华 徐康 |
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| 作者单位： | 兰州大学物理系!甘肃兰州，730000(邵乐喜，谢二庆，贺德衍)，北京工业大学应用物理系!北京100022(陈光华)，中国科学院化学物理研究所!甘肃兰州730000(徐康) |
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| 基金项目： | 国家教委优秀青年教师基金，国家自然科学基金!69676005 |
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| 摘 要： | 研究了纳米金刚石粉预处理的光滑硅衬底上CVD金刚石薄膜的成核与生长．通过与研磨处理样品相比较，纳米金刚石的预处理极大地提高了成核密度（可达109／cm2）、成核速度与成膜质量，并能方便地进行成核密度的控制，是一种经济实用、简单有效的预处理方法．
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| 关 键 词： | CVD金刚石 成核 衬底预处理 纳米金刚石粉 |
| 收稿时间： | 1998-1-20 |
| 修稿时间： | 1998-2-27 |
Nucleation and Growth of CVD Diamond Films on Smooth SiSubstrate Pretreated by Nanodiamond Powders |
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| SHAO Le-Xi,XIE Er-Qing,HE De-Yan,CHEN Guang-Hua,XU Kang.Nucleation and Growth of CVD Diamond Films on Smooth SiSubstrate Pretreated by Nanodiamond Powders[J].Journal of Inorganic Materials,1998,13(6):0-931. |
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| Authors: | SHAO Le-Xi XIE Er-Qing HE De-Yan CHEN Guang-Hua XU Kang |
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| Affiliation: | DepartmentofPhysics;LangzhouUniversityLanzhou730000China;DepartmentofAppliedPhysics;BeijingPolytechnicUniversityBeijing100022China;InstituteofChemistryandPhysics;ChineseAcademyofSciencesLanzhou730000China |
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| Abstract: | Ultradispersed nanodiarnond powder synthesized by explosive detonation was used for thepretreatment of mirror Si substrate for nucleation and growth of diamond by microwave plasmaCVD. Compared with the scratching pretreatment, it is found that the pretreatment method bycoating substrate with the slurry loading nanodiamond powder not only enhances both of density(up to .109 cm-2) and nucleation rate, improving the quality of grown-up film greatly, but alsocontrols nucleation easily. In addition, this pretreatment is also very cost-effective, non-damaging,and reproducible as well. |
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| Keywords: | CVD diamond nucleation pretreatment of substrate nanodiamond powder |
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