5/spl times/9 integrated optical star coupler in silicon-on-insulator technology

We describe fabrication of the first optical star coupler in silicon-on-insulator (SOI) technology. The 5/spl times/9 coupler consists of two silicon rib waveguide arrays with a radiative slab waveguide region. The star geometry was analyzed and designed using the beam propagation method. The coupler exhibits low loss (average excess insertion loss /spl alpha//spl sim/1.3 dB) and good coupling uniformity (standard deviation /spl sigma//spl sim/1.4 dB) at /spl lambda/=1.55 /spl mu/m. It represents a key component for realization of photonic circuits in a silicon integrated circuit technology.