面向5G的MEMS跷跷板结构功率传感器

为了解决5G功率传感器灵敏度不高的问题,创新性地提出一种可面向5G应用的MEMS跷跷板结构功率传感器。S参数测试结果表明,在1 GHz-10 GHz的频段内传感器的回波损耗小于-12.5 dB,插入损耗小于1.5 dB。功率响应测试表明,内部电容的灵敏度接近69.2aF/mW@1GHz、71.5aF/mW@5GHz和66.3aF/mW@10GHz,外部电容的灵敏度约为35.2aF/mW@1GHz、33.0aF/mW@5GHz和27.6aF/mW@10GHz,表明该跷跷板结构设计提高了传感器的灵敏度。

Research on Power Sensor with MEMS Seesaw-type Architecture for 5G Applications

In this paper,a power sensor with MEMS seesaw-type architecture is proposed for 5G applications to solve the low sensitivity problem of 5G power sensors.The S-parameter testing results show that the return loss is less than-12.5 dB and the insertion loss is better than 1.5 dB for the sensors with the frequency range 1 GHz-10 GHz.The power response testing demonstrates that the measured sensitivities for inner capacitance are close to 69.2aF/mW@1GHz,71.5aF/mW@5GHz and 66.3aF/mW@10GHz,respectively,while the sensitivities for outer capacitance are close to 35.2aF/mW@1GHz,33.0aF/mW@5GHz and 27.6aF/mW@10GHz,respectively.It shows that the proposed seesaw-type architecture design effectively improves the sensitivity of the sensor.