| 微型传感器中氮化硅薄膜的微加工技术 |
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| 引用本文： | 金鹏,谭久彬,刘岩. 微型传感器中氮化硅薄膜的微加工技术[J]. 传感器与微系统, 2001, 20(3): 51-53 |
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| 作者姓名： | 金鹏 谭久彬 刘岩 |
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| 作者单位： | 1. 哈尔滨工业大学 自动化测试及控制系,
2. 黑龙江广播电视大学, |
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| 摘 要： | 简要介绍了基于磁控射频溅射技术的Si3 N4 薄膜沉积技术及Si3 N4 薄膜基于剥离 (lift-off)技术的微加工技术。实验结果表明该技术适用于微型传感器及MEMS中绝缘薄膜的加工
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| 关 键 词： | 微型传感器 微型机电系统 氮化硅薄膜 磁控射频溅射 剥离技术 微加工技术 |
| 文章编号： | 1000-9787(2001)03-0051-03 |
| 修稿时间： | 2001-01-31 |
Microfabrication of silicon nitride film applied in microsensor |
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| JIN Peng ,TAN Jiu-bin ,LIU Yan. Microfabrication of silicon nitride film applied in microsensor[J]. Transducer and Microsystem Technology, 2001, 20(3): 51-53 |
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| Authors: | JIN Peng TAN Jiu-bin LIU Yan |
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| Affiliation: | JIN Peng 1,TAN Jiu-bin 1,LIU Yan 2 |
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| Abstract: | The depositon of silicon nitride film based on RF magnetron-sputtering and the micorfabrication of silicon nitride film based on lift-off technique are described in this article. The experiment result showed that it is an effective method of Si 3N 4 film's fabrication for microsensor and MEMS purpose. |
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| Keywords: | microsensor MEMS silicon nitride film R.F. magnetron-sputtering lift-off technology microfabrication technology |
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