利用激光干涉技术研究压电换能器的谐振特性

介绍了压电超声换能器的基本结构及振动模态，利用先进的激光多普勒干涉仪对自制换能器的谐振特性以及振动速度和位移分布进行了测量和分析，并与有限元分析的结果进行了对比，实验表明，实验测量模态结果与有限元分析结果基本相符，激光多普干涉技术是一种直观研究压电超声换能器振动的有效手段。通过有限元分析和先进测量手段的结合与对比，对换能器的设计和制作具有指导意义。

Study on the Resonance Vibration Properties of Piezoelectric Ultrasonic Transducer by Laser Doppler Interferometry

This paper has discussed basic structure and vibration modes of piezoelectric ultrasonic transducer (PUT).The vibration modes and velocities of PUT have been measured by laser Doppler interferometry and compared with finite element analysis results.Th results show the measurement modes and FEA calculated ones are well matched.It also shows that laser Doppler interferometry is an accurate and robust techinique for the measurement of the displacement field responses of PUT.The connection and comparison between FEA and advanced measurement tools have provided much help to the design and fabrication of PUT and it is also an effective and efficient way to study on the vibration of PUT and furthermore piezoelectric ceramic device.