| 滤光片对三角位移传感器测量误差的影响 |
| |
| 引用本文： | 朱万彬.滤光片对三角位移传感器测量误差的影响[J].光机电信息,2011(11):89-91. |
| |
| 作者姓名： | 朱万彬 |
| |
| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室; |
| |
| 摘 要： | 为了提高激光位移传感器接收系统的信噪比,往往在CCD或PSD接收器前加滤光片.但是,滤光片对接收光线的折射作用将引起测量误差,而且该误差是非线性的,对于高精度位移传感器来说,这个误差是不可忽略的.设计了一种补偿方法,实验表明该方法可行.
|
| 关 键 词： | 平行平板 非线性补偿 |
Influnce of Filter on Measure Error of Displacement Sensor |
| |
| ZHU Wan-bin.Influnce of Filter on Measure Error of Displacement Sensor[J].OME Information,2011(11):89-91. |
| |
| Authors: | ZHU Wan-bin |
| |
| Affiliation: | ZHU Wan-bin(State Key laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China) |
| |
| Abstract: | In order to improve receiving system signal to noise ratio of the laser displacement sensor,people often place receiver filter in front of CCD or PSD.But the filter for receiving light refraction will cause measurement error,the error is non-linear,and can not be ignored by high-precision displacement sensor.We design a compensation method for this non-linear measure error.The experiments show that the method is feasible. |
| |
| Keywords: | parallel plate nonlinear compensation |
| 本文献已被 CNKI 维普 等数据库收录！ |
|
