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Diamond and diamond-like carbon films
Affiliation:1. Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan;2. Department of Electrical and Electronic Engineering, Daido University, Nagoya, Aichi 457-8530, Japan;1. Sobolev Institute of Geology and Mineralogy, Siberian Branch of the Russian Academy of Sciences, Koptyug Pr., 3, Novosibirsk 630090, Russian Federation;2. Novosibirsk State University, 630090, Russia;1. Dipartimento di Scienze della Terra, Università degli Studi di Torino, Via Valperga Caluso 35, I-10125 Torino, Italy;2. Dipartimento di Geoscienze, Università degli Studi di Padova, Via Gradenigo 6, I-35131 Padova, Italy
Abstract:Polycrystalline diamond films are grown from low pressure gas mixtures, the deposition techniques are Microwave Plasma Chemical Vapour Deposition and Hot filament Chemical Vapour Deposition, in both techniques the deposition temperature is close to 900°C. The film growth process is strongly dominated by the initial nucleation stage, after this stage, the film grows at a rate of one micron per hour. The carbon atoms in the diamond film are fully fourfold (sp3) co-ordinated and the film properties are close to those of single crystalline diamond: extremely hard, resistant and transparent from UV to IR.Diamond-like carbon (DLC) films are amorphous and contain a variable amount of hydrogen in their structure, the carbon atoms are partially threefold (sp2) co-ordinated. Films are obtained at temperatures below 250°C and deposited on almost any substrate. Film composition, structure and functional properties are strongly dependent on the level of ionic bombardment of the film during growth. DLC films are very hard, have a low friction coefficient and good wear resistance, are chemically inert and are transparent in the IR.
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