阀金属化合物在高比容铝电解电容器中的研究进展

为了适应近年来电子产品功能化和小型化的发展趋势,铝电解电容器正向着小型化、大容量的方向发展,制备高比容阳极箔的技术是实现这一目标的有效途径之一。本文系统介绍了制备高比容铝电解电容器用阳极箔表面阀金属化合物薄膜的沉积技术,从不同沉积技术制备出薄膜质量的角度,阐述了各种沉积技术在制备铝电解电容器用阳极箔时的优缺点；并分析了通过复合阀金属化合物薄膜的方法来提高阳极箔电性能的研究进展,探讨了高比容铝电解电容器用阳极箔制备技术未来的发展趋势。

Research Progress of Valve Metal Compound in High Specific Capacitance Aluminum Electrolytic Capacitors

To meet the development trend of functionalization and miniaturization of electronic products in recent decades, aluminum electrolytic capacitors are facing the same trend to achieve miniaturization and high electrical properties.SOne of the most effective ways to make it actualize is the preparation of high specific capacitance anode foil. By depositing a thin film that has high relative permittivity on aluminum foil, the permittivity of abode composite film as well as the specific capacitance of aluminum electrolytic capacity will both be largely enhanced.SIn this review, we systematically introduce the deposition techniques for the preparation of valve metal compounds for aluminum electrolytic capacitors. From the perspective of the film quality prepared by different deposition techniques, we expound the advantages and disadvantages of the various deposition techniques when preparing the anode composite foil for aluminum electrolytic capacitors. Further, we analyze the research progress of increasing the electric performance of anode foil by composite a valve metal thin film. Accordingly, several outlooks for promoting the practical applications of high specific capacitance aluminum electrolytic capacitors are proposed.