Kinetic modeling of laser annealing processes in a-C:H films |
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| Affiliation: | 1. Department of Laser Sciences and Interactions, National Institute of Laser Enhanced Sciences, Cairo University, El-Giza 12613, Egypt;2. Nanotechnology Lab., Electronics Research Institute (ERI), Cairo, Egypt;3. Department of Physics, Faculty of Science, Cairo University, El-Giza 12613, Egypt |
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| Abstract: | In this research work, a nanosecond-pulsed YAG:Nd laser was used to modify the properties of an amorphous hydrogenated carbon film, which was deposited on c–Si substrate. Experimental examination has revealed that the primary effect of irradiation is diamond-to-graphite transformation or, more specifically, carbon sp3-to-sp2 hybridization transition. These findings were qualitatively verified by numerical simulation of kinetic processes that proceed in the film under laser irradiation. |
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