Influence of metal-ferroelectric contacts on the space charge formation in ferroelectric thin film capacitors |
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Authors: | A B Kozyrev M M Ga?dukov A G Gagarin A G Altynnikov S V Razumov A V Tumarkin |
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Affiliation: | 1. St. Petersburg State Electrotechnical University, St. Petersburg, 197376, Russia
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Abstract: | We have studied the response speed characteristics of capacitor structures based on thin Ba0.3Sr0.7TiO3 (BSTO) films with metal-ferroelectric contacts of various types formed under different conditions. It is established that threshold voltages exist for the appearance of a residual space charge in some structures. A comparative analysis of the technological features of contact formation and experimental data on the characteristics of samples leads to the conclusion that, by forming Pt-BSTO contacts in an oxygen-containing atmosphere, it is possible to suppress the injection of carriers into the ferroelectric film in the capacitor structure. |
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