|
|||||
|
|
Detection of lattice defects in InP and (InGa)As using selective photoetching |
|
| Authors: | V. Gottschalch R. Srnanek G. Wagner |
| Affiliation: | (1) Sektion Chemie der Karl-Marx-Universität Leipzig, Liebigstrasse 18, 7010 Leipzig, East Germany;(2) Present address: Elektrotechnicka faculta, katedra mikroelektroniky, Vazovava 5, 880 19 Bratislava, Czechoslovakia |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |