| 纳米微孔SiO2薄膜的Sol—Gel制备及气孔率控制 |
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| 引用本文： | 方国家 姚凯伦. 纳米微孔SiO2薄膜的Sol—Gel制备及气孔率控制[J]. 功能材料, 1999, 30(2): 190-192 |
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| 作者姓名： | 方国家 姚凯伦 |
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| 作者单位： | [1]华中理工大学物理系 [2]中国科学院国际材料物理中心 |
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| 基金项目： | 英国帝国理工学院访问学者基金 |
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| 摘 要： | 本文报道了纳米微孔ＳｉＯ２薄膜的溶胶－凝胶（ｓｏｌ－ｇｅｌ）制备工艺，利用椭圆偏振光测试仪（Ｅｌｌｉｐｓｏｍｅｔｅｒ）直接测量了薄膜的厚度、折射率、从而得到了ＳｉＯ２薄膜的气孔率及气孔大小分布。研究了合成工艺条件及浓Ｈ２ＳＯ４表面修饰对ＳｉＯ２薄膜气孔率及稳定性的影响。
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| 关 键 词： | 纳米微孔 sol－gel 薄膜 气孔率控制 二氧化硅 |
Preparation of Nanometer Porous Silica Thin Films by the Sol-Gel Technique and Their Porosity Control |
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| FANG Guojia,LIU Zuli,YAO Kailun,, Dept. of Physics,Huazhong Univ. of Sci , Tech.,Wuhan,,China, International Center for Material Physics,Chinese Academy of Sciences,Shenyang,,China, CCAST. Preparation of Nanometer Porous Silica Thin Films by the Sol-Gel Technique and Their Porosity Control[J]. Journal of Functional Materials, 1999, 30(2): 190-192 |
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| Authors: | FANG Guojia LIU Zuli YAO Kailun Dept. of Physics Huazhong Univ. of Sci & Tech. Wuhan China International Center for Material Physics Chinese Academy of Sciences Shenyang China CCAST |
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| Abstract: | In this paper,we have reported the fabrication techniques of nanometer porous silica thin films prepared by the sol-gel method.Thickness,refractive indices,porosity and pore size distribution have been characterized by the molecule probe ellipsometry technique.The effect of fabrication conditions and surface treatment after annealing on the porosity and other properties have been also discussed in this paper. |
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| Keywords: | nanometer porous silica sol-gel thin film porosity control |
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