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用于单个纳米颗粒检测的固态纳米孔器件的仿真与优化
引用本文:张宇,魏胜,李民权,赵超,罗军,黄成军.用于单个纳米颗粒检测的固态纳米孔器件的仿真与优化[J].传感技术学报,2015,28(10):1425-1431.
作者姓名:张宇  魏胜  李民权  赵超  罗军  黄成军
作者单位:1. 安徽大学智能计算与信号处理重点实验室,合肥230039;中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029;2. 安徽大学智能计算与信号处理重点实验室,合肥,230039;3. 中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029
摘    要:基于固态纳米孔器件的检测技术是近年来的研究热点,它可广泛用于各种纳米颗粒、生物分子检测及DNA测序等各个领域.采用数值方法对两种常用的纳米孔器件,即圆柱形纳米孔和棱台形纳米孔器件在检测纳米颗粒穿过时的局部电场变化以及离子电流特性进行了系统性的仿真和分析,提出了采用纳米孔阻塞电流因子,来评估器件性能.在此基础上,深入分析和讨论了纳米孔的孔径和孔深等参数的变化对检测纳米粒子性能的影响,并提出了优化的纳米孔器件设计方案.研究结果对纳米孔器件的制备,以及其在检测纳米颗粒的应用实践中提供了理论指导.

关 键 词:纳米孔  数值方法  单纳米粒子检测  阻塞电流因子

Simulation and Optimization of Solid-State Nanopore for Single-Nanoparticle Detection
Abstract:The solid-state nanopore-based detection technique is attracting extensive research interests,which can be widely used for various applications,such as nanoparticle detection,biomolecule analysis and DNA sequencing. In this study,two types of nanopores,the cylindrical nanopore and the pyramidal-shaped nanopore,were systemati-cally studied in single nanoparticle detection using numerical method. When a single nanoparticle passed through the nanopore,the local electric field waschanged,and a blockage ionic current wasinduced. The nanopore blockage current factor was defined to evaluate the performance of the nanopore for nanoparticle detection. The effects of dif-ferent geometrical conditions of the nanopore device,such as the aspect ratio of the pore,the ratio of the particle and pore sizes on the device performance were discussed,and a quantitative relationship between them was ob-tained. Based on the obtained results,an optimal nanopore design for nanoparticle detection was proposed. This study mayprovide guidelines for the nanopore fabrication and for the application of nanopore-based single nanoparti-cle detection.
Keywords:nanopore  numerical method  single-nanoparticle detection  current change ratio
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